A time division capacitive feedback method of electrostatic MEMS mirror driven by PWM signal

Publication date: Available online 20 February 2021Source: Sensors and Actuators A: PhysicalAuthor(s): Changfeng Xia, Dayong Qiao, Xudong Song, Xiumin Song, Wenhui Zheng, Yaojun He, Banghua Wu

Source: Sensors and Actuators A: Physical - February 20, 2021 Category: Physics Source Type: research