Temperature-insensitive Silicon Resonant Pressure Sensor by Thermal Stress Control

Publication date: Available online 17 February 2021Source: Sensors and Actuators A: PhysicalAuthor(s): Libo Zhao, Xiangguang Han, Qi Mao, Zhikang Li, Ping Yang, Qijing Lin, Hongyan Wang, Xin Yan, Songli Wang, Nan Zhu, Yonglu Wang, Jiuhong Wang, Zhuangde Jiang

Source: Sensors and Actuators A: Physical - February 17, 2021 Category: Physics Source Type: research