Ta-doped epitaxial β-Ga2O3 films deposited on SrTiO3(100) substrates by MOCVD

Publication date: 15 June 2021Source: Materials Science in Semiconductor Processing, Volume 128Author(s): Di Wang, Xiaochen Ma, Hongdi Xiao, Yong Le, Jin Ma
Source: Materials Science in Semiconductor Processing - Category: Materials Science Source Type: research