Precise glass microstructuring with laser induced backside wet etching using error-compensating scan path

Publication date: Available online 12 January 2021Source: Journal of Materials Processing TechnologyAuthor(s): Kui-Kam Kwon, Ki Young Song, Jae Min Seo, Chong Nam Chu, Sung-Hoon Ahn

Source: Journal of Materials Processing Technology - January 12, 2021 Category: Materials Science Source Type: research