Dynamic spring constants of higher resonance modes of uniform and tapered microcantilevers with tip masses

Publication date: Available online 25 November 2019Source: MicronAuthor(s): M.A. MahmoudAbstractA comprehensive data set is presented that covers eigenvalues and dynamic stiffness of width-tapered microcantilevers for a wide range of the taper ratio and tip mass ratios. Closed form expressions are presented, which could help designers and researchers in the MEMS field in general, and atomic force microscopy in particular.

Source: Micron - November 26, 2019 Category: Biology Source Type: research