FIBSIMS: A review of secondary ion mass spectrometry for analytical dual beam focussed ion beam instruments

Publication date: Available online 18 December 2018Source: Progress in Crystal Growth and Characterization of MaterialsAuthor(s): Lex Pillatsch, Fredrik Östlund, Johann MichlerAbstractSecondary ion mass spectrometry (SIMS) is a well-known technique for 3D chemical mapping at the nanoscale, with detection sensitivity in the range of ppm or even ppb. Energy dispersive X-ray spectroscopy (EDS) is the standard chemical analysis and imaging technique in modern scanning electron microscopes (SEM), and related dual-beam focussed ion beam (FIBSEM) instruments. Contrary to the use of an electron beam, in the past the ion beam in FIBSEMs has predominantly been used for local milling or deposition of material. Here, we review the emerging FIBSIMS technique which exploits the focused ion beam as an analytical probe, providing the capability to perform secondary ion mass spectrometry measurements on FIBSEM instruments: secondary ions, sputtered by the FIB, are collected and selected according to their mass by a mass spectrometer. In this way a complete 3D chemical analysis with high lateral resolution < 50 nm and a depth resolution < 10 nm is attainable.We first report on the historical developments of both SIMS and FIB techniques and review recent developments in both instruments. We then review the physics of interaction for incident particles using Monte Carlo simulations. Next, the components of modern FIBSIMS instruments, from the primary ion generation in the liquid m...
Source: Progress in Crystal Growth and Characterization of Materials - Category: Chemistry Source Type: research