Staging of RF-accelerating Units in a MEMS-based Ion Accelerator

We present a simple model to describe the measured results. We also discuss some of the scaling behaviour of a compact MEQALAC. The MEMS-based approach enables a low-cost, highly versatile accelerator covering a wide range of currents (10μA to 100mA) and beam energies (100 keV to several MeV). Applications include ion-beam analysis, mass spectrometry, materials processing, and at very high beam powers, plasma heating.

Source: Physics Procedia - October 26, 2017 Category: Physics Source Type: research