Multifunctional X-ray Lithography Station at VEPP-3

Publication date: 2016 Source:Physics Procedia, Volume 84 Author(s): B.G. Goldenberg, A.G. Lemzyakov, V.P. Nazmov, V.F. Pindyurin The multifunctional X-ray lithography “LIGA” station on beamline 0 at the VEPP-3 synchrotron source is part of the shared-use center “Siberian Synchrotron and Terahertz Radiation Center” (SSTRC) in Budker Institute of Nuclear Physics (BINP, Novosibirsk, Russia). The station is intended to exposure of resist layers on substrates of different shape and lateral dimensions of 1 to 10cm. The development of process and re-equipment of the station goes forward, continuously. In this work we consider the current capabilities of the station; examples of microstructures fabricated are presented.

Source: Physics Procedia - December 12, 2016 Category: Physics Source Type: research