Fabrication of High-effective Silicon Diffractive Optics for the Terahertz Range by Femtosecond Laser Ablation

Publication date: 2016 Source:Physics Procedia, Volume 84 Author(s): V.S. Pavelyev, M.S. Komlenok, B.O. Volodkin, B.A. Knyazev, T.V. Kononenko, V.I. Konov, V.A. Soifer, Yu.Yu. Choporova Comparison of the two laser sources (UV nanosecond and IR femtosecond) used for the formation of micro-relief at the silicon surface showed the advantage of the second one. A four-level silicon diffractive THz Fresnel lens has been fabricated by laser ablation at high repetition rate (f = 200kHz) of femtosecond Yb:YAG laser. Features of the lens were investigated in the beam of the Novosibirsk free electron laser at the wavelength of 141μm. Detailed results of investigation of fabricated lens micro-relief are presented. The measured diffractive efficiency of the lens is in good agreement with the theoretical prediction.
Source: Physics Procedia - Category: Physics Source Type: research
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