Mobile setup for synchrotron based in situ characterization during thermal and plasma-enhanced atomic layer deposition

We report the design of a mobile setup for synchrotron basedin situ studies during atomic layer processing. The system was designed to facilitatein situ grazing incidence small anglex-ray scattering (GISAXS),x-ray fluorescence(XRF), andx-ray absorption spectroscopy measurements at synchrotron facilities. The setup consists of a compact high vacuum pump-type reactor foratomic layer deposition(ALD). The presence of a remote radio frequency plasma source enablesin situ experiments during both thermal as well as plasma-enhancedALD. The system has been successfully installed at different beam line end stations at the European Synchrotron Radiation Facility and SOLEIL synchrotrons. Examples are discussed ofin situ GISAXS andXRF measurements during thermal and plasma-enhancedALD growth of ruthenium from RuO4 (ToRuS ™, Air Liquide) and H2 or H2 plasma, providing insights in the nucleation behavior of these processes.

Source: Review of Scientific Instruments - November 16, 2016 Category: Physics Authors: Jolien Dendooven, Eduardo Solano, Matthias M. Minjauw, Kevin Van de Kerckhove, Alessandro Coati, Emiliano Fonda, Giuseppe Portale, Yves Garreau and Christophe Detavernier Source Type: research