The reactor –activator for gas-jet deposition of diamond structures

This paper presents a new method of deposition ofdiamond anddiamond like structures by using the original reactor for activation of carbonaceous gas mixtures. One of the important characteristics of the described reactor is the power efficiency owing to low heat losses. The new method of gasflow formation opens new possibilities to get important trade-offs (wide range of background conditions and others). The principal possibility ofdiamond deposition is proved by experiments with theflow of hydrogen andmethane mixture intungsten resistively heating cylindrical channels. Electron microphotographs and Raman spectrum of deposited structures prove the fact that deposited samples arediamond structures. Numerical study of the mixtureflow through the reactor was carried for optimization of gasflow conducted to a substrate.
Source: Review of Scientific Instruments - Category: Physics Authors: Source Type: research
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