A single-step lithography system based on an enhanced robotic adhesive dispenser

In the paper, we present a single-steplithography system whereby the robotically controlled micro-extrusion ofresistadhesive onto a substrate surface to directly createresistadhesivepatterns of interest. This system is modified from aroboticadhesive dispenser by shrinking the aperture of the nozzle to a few micrometers aiming to realizepatterns at microscale. From experimental investigation, it is found that working factors including writing speed, working time, and applied pressure can be adopted to conveniently regulate the feature size (the width of the line features and the diameter of the dot features). To test its functionality, the system was used topattern line features onsilicon dioxide (SiO2) and generate an array of square-likesilicon microstructure by combining with wetetching. It provides a simple and flexible alternative tool to facilitate the development of microfabrication.

Source: Review of Scientific Instruments - September 30, 2016 Category: Physics Authors: Jiyao Xing, Weibin Rong, Ding Sun, Lefeng Wang and Lining Sun Source Type: research